ELECTRODISPLAY SIEVE ACTUATOR FOR USE IN ACTUATED MIRROR ARRAY

摘要

PURPOSE: To reduce contact resistance and to make exact the operation of a mirror mounted on an electrodispressive member by interposing a metal layer and a conductive paste layer between 1st and 3rd metal electrodes. CONSTITUTION: Electrodispressive members 31a and 31b are deformed in the direction to be determined by the polarity of a voltage impressed between a 1st metal electrode 36 and a 2nd metal electrode 37a or 37b. An opening 11 through a board 1 for impressing the voltage is formed between the members 31a and 31b. Besides, when a 3rd metal electrode 12 fills the opening 11 and an actuator 30 is mounted on the board 1, it is electrically connected with the 1st metal electrode 36 through conductive adhesive paste 13. Further, a metal layer 38 is formed under the 1st metal electrode 36 by sputtering, etc. With this metal layer 38, the contact area between the 1st metal electrode 36 and the adhesive paste 13 is widened, the contact resistance with the 3rd metal electrode 12 is reduced, and the inclining operation of a mirror 50 is made exact.