Enhanced temperature stability of sensitivity for MEMS gyroscope based on frequency mismatch control

摘要

This paper presents a method to improve sensitivity stability of a mismatched gyroscope by frequency adjustment between sense mode and drive mode. This method can isolate the sense and drive mode frequency response dynamics through tuning bias voltage applied between sense electrodes and the vibrating masses. Theoretical calculation of mechanical sensitivity with variable and constant frequency mismatch as a function of temperature are carried out, showing a histrionic improvement of stability when frequency mismatch is kept constant. Then, in the experiment part, scale factor at different temperature with and without frequency mismatch control are measured, and experimental results indicate and verify the feasibility of the proposed approach to improve dynamic performance of sensitivity stability in a temperature range from -40 to 60 A degrees C, improving the scale factor temperature coefficient from over 1300 to 282.12 ppm/A degrees C.