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MEMS GYROSCOPE WITH REGULATION OF THE MISMATCH BETWEEN THE DRIVING AND SENSING FREQUENCIES
MEMS GYROSCOPE WITH REGULATION OF THE MISMATCH BETWEEN THE DRIVING AND SENSING FREQUENCIES
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机译:驱动和传感频率之间的不匹配调节的MEMS陀螺仪
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摘要
A MEMS gyroscope can include a supporting structure and a mobile mass elastically suspended from the supporting structure in a driving direction and in a sensing direction, mutually perpendicular. A driving structure is coupled to the mobile mass for controlling a driving movement of the mobile mass in the driving direction at a driving frequency. A driving-frequency tuning electrode, distinct from the driving structure, faces the mobile mass. A driving-frequency tuner electrically coupled to the driving-frequency tuning electrode for supplying a tuning voltage to the driving-frequency tuning electrode.
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