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Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O2/Ar-O2 plasmas

机译:使用电探针测量感应耦合的Ar / O2 / Ar-O2等离子体的光发射诊断

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摘要

Physical properties of low-pressure inductively coupled argon, oxygen, and Ar-O_2 mixture plasmas are investigated using optical emission spectroscopy (OES) combined with an rf-compensated Langmuir probe measurement. In each gas discharge, the electron density and the electron temperature were obtained by using the probe. The electron temperature was also obtained by OES models and compared with that measured by the probe. The electron temperature was observed to decrease with increasing power and pressure and also observed to decrease with increasing Ar content. Argon metastable densities were calculated based on an optical transition model. In Ar-O2 discharges, the dissociation fraction of O2 molecules was estimated using optical emission actinometry. The dissociation fraction was observed to increase with increasing power and Ar content.
机译:低压感应耦合氩,氧和Ar-O_2混合等离子体的物理性质是使用光学发射光谱(OES)结合射频补偿的Langmuir探针测量来研究的。在每次气体放电中,通过使用探针获得电子密度和电子温度。电子温度也可以通过OES模型获得,并与探针测得的温度进行比较。观察到电子温度随着功率和压力的增加而降低,并且还观察到随着Ar含量的增加而降低。基于光学跃迁模型计算氩亚稳密度。在Ar-O2放电中,O2分子的解离分数是使用光发射光化法估算的。观察到解离分数随功率和Ar含量的增加而增加。

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