The authors have been conducting research on the thermal driven type micro actuator using silicon bimetal (Si/Al). This type of actuator has an excellent dynamic characteristic that realizes both the bigger force generation and the longer stroke. The paper describes a newly developed micro relay which operates with the low voltages of 12 V and 24 V. The micro relay fabricated is a 1a type and the chip size of 2.0 mm×3.0 mm, achieving the driving power of 100 mW with the contact force of 3 mN, the input-output breakdown voltage of 500 V and the contact-to-contact breakdown voltage of 300 V.
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