Our research, based on the use of Silicon bimetal (Si/AL) materials in MEMS (micro-electromechanical systems) technology, has revealed exciting results. The use of silicon bimetal in MEMS devices improves both actuation forces and stroke. In our study, we have found that the use of silicon bimetal to actuate MEMS devices has produced results of a low voltage actuation. In addition, we have fabricated a one form-A (1-a) configuration micro-relay having dimensions as small as 2.Omm x 3.Omm and a control power of only 100mw. Moreover, we have also been able to achieve a breakdown capability of 500V and contact forces of 3mN. All were very interesting results in the field of MEMS technology.
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机译：我们的研究基于MEMS（微机电系统）技术的硅双金属（Si / Al）材料的使用，揭示了令人兴奋的结果。在MEMS器件中使用硅双金属件改善了致动力和行程。在我们的研究中，我们发现使用硅双金属致动MEMS器件的使用产生了低电压致动的结果。此外，我们制造了一种（1-A）配置微继电器，其具有小于2.OMM x 3.OMM的尺寸，仅为100mW的控制功率。此外，我们还能够实现500V的击穿能力和3Mn的接触力。在MEMS技术领域，所有人都非常有趣。
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