Thickness Measurement of Thin Textured Films by a Novel X-Ray Diffraction Method Accounting for Secondary Extinction

摘要

Accounting for secondary extinction (SE) of the intensities measured from a textured film by means of conventional X-ray diffractometer, a new X-ray diffraction method is described for determination of film thickness. Physically, the problem is restricted to using a reflection pair corresponding to the main component of the texture. As model sample a vacuum-deposited silver thin film is used.