Fabrication of fluorocarbon terminated DLC thin film using soft X-ray

摘要

The control of wettability on a diamond-like carbon (DLC) thin film was carried out by exposing the film to synchrotron radiation (SR) ranging 50-1000 e V under perfluorohexane (C_6F_(14)) gas atmosphere. The contact angle of the DLC surface with a water droplet was found to increase from 73 deg to 114 deg by the SR irradiation under C_6F_(14) gas atmosphere. The chemical components variations of the DLC surface were studied using X-ray photoelectron spectroscopy and the modified DLC film with F was studied using near-edge X-ray absorption fine structure spectroscopy. By mounting the new sample holder for the parallel SR irradiation, we succeeded in preventing secondary reaction of deposited material and controlling the contact angle of the fluorocarbon modified DLC surface.