Synthesis of carbon nanotubes grown by hot filament plasma-enhanced chemical vapor deposition method

摘要

We prepared two kinds of catalytic layers onto n-typed silicon substrate-nickel by r.f.-magnetron sputtering and iron (III) nitrate metal oxide by spin coating. For iron (III) nitrate metal oxide 0.5 mol of ferric nitrate nonahydrate [Fe_2(NO_3)_3 ·9H_2O] ethanol solution was coated onto silicon by spin coater at different rotation speeds (rev./min). Carbon nanotubes were synthesized on both Ni and iron (III) nitrate metal oxide layers by the HFPECVD (hot filament plasma-enhanced chemical vapor deposition) method. We used ammonia (NH_3) and acetylene (C_2H_2) for the dilution gas and a carbon precursor for the growth of the carbon nanotubes, respectively. We could observe the relationship between the catalytic cluster density and the nanotube density with scanning electron microscopy (SEM) images. The density of carbon nanotubes on iron (III) nitrate metal oxide was controlled by the rev./min of the spin coater. Transmission electron microscopy (TEM) image shows multi-walled carbon nanotube where the catalyst was found in the tip of the carbon nanotube. Electron dispersive X-ray spectrometry (EDS) peaks for CNT's tip show that it was constituted with nickel and iron, respectively. Raman spectroscopy of nanotubes shows D-band and G-band peaks approximately 1370 and 1590 cm~(-1).