首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >Study on effect of oxygen adsorption on characteristics of field electron emission from aligned carbon nanotubes grown by plasma-enhanced hot filament chemical vapor deposition
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Study on effect of oxygen adsorption on characteristics of field electron emission from aligned carbon nanotubes grown by plasma-enhanced hot filament chemical vapor deposition

机译:氧吸附对等离子体增强热丝化学气相沉积法生长取向碳纳米管场电子发射特性的影响

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摘要

The characteristics of field electron emission (FE) from aligned carbon nanotubes (ACNTs) in a form of film, which were catalytically grown by plasma-enhanced hot filament chemical vapor deposition, were measured for many cycles. The results indicate that the FE characteristic for every measurement cycle is different and it follows the Fowler-Nordheim model in the low field region, but it deviates from the model in the high field region. The ACNTs were investigated by energy dispersive X-ray (EDX) and the EDX spectrum shows that oxygen is adsorbed on the ACNTs. The theory related to adsorption and space-charge effect was applied to analyze the experimental results.
机译:在多个循环中,测量了通过等离子体增强的热丝化学气相沉积催化生长的薄膜状取向碳纳米管(ACNT)的场电子发射(FE)特性。结果表明,每个测量周期的有限元特征是不同的,并且在低场区域遵循Fowler-Nordheim模型,但在高场区域则偏离模型。通过能量色散X射线(EDX)研究了ACNT,并且EDX光谱表明氧吸附在ACNT上。应用与吸附和空间电荷效应有关的理论来分析实验结果。

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