Comparative study of homoepitaxial single crystal diamond growth at continuous and pulsed mode of MPACVD reactor operation

摘要

Homoepitaxial growth of single crystal diamond by microwave plasma chemical vapor deposition in pulsed regime of a 2.45 GHz MPACVD reactor operation at pulse repetition rates of 150 and 250 Hz was investigated. The high quality CVD diamond layers were deposited in the H_2-CH_4 gas mixture containing 4% and 8% of methane, gas pressures of 250 and 260 Torr and substrate temperature of 900 °C without any nitrogen addition. The (100) HPHT single crystal diamond seeds 2.5x2.5x03 mm (type lb) were used as substrates. At pulse repetition rate 150 Hz the high quality single crystal diamond was grown with growth rate of 22 um/h. The comparison of the single crystal diamond growth rates in CW and pulsed wave regimes of MPACVD reactor operation at microwave power density 200 W/cm~3 was made. It was found that at equal power density, the growth rate in pulsed wave regime was higher than in CW regime. Differences in single crystal diamond growth for two sets of experiments (with continuous and pulsed wave regimes) were explained.