INTEGRATED RF POWER SUPPLY SINGLE INPUT MULTIPLE OUTPUT CONTROL FOR OPERATION IN CONTINUOUS AND PULSED OPERATION MODE

摘要

To provide an RF control system that includes an RF generator having a power amplifier that outputs a radio frequency (RF) signal and a controller.SOLUTION: A matching network receives an RF signal and generates a plurality of RF output signals. The matching network includes a ratio adjustment element for varying a power ratio between the plurality of RF output signals. A first controller transmits a wireless control signal to the matching network, and the matching network controls the ratio adjustment element according to the wireless control signal. An RF control systems operates in continuous and pulsed operation mode. The controller may also control the rising or falling edge of the pulse edge, or the level or duration of the incremental change at the pulse edge.SELECTED DRAWING: Figure 1