Design of a microactuator array against the coupled nature of microelectromechanical systems (MEMS) processes

摘要

Piezoelectric micromirror array is developed based on microelectromechanical systems (MEMS) technology. The inherent coupled nature of the thin-film processes generates many problems unless the design of the microactuator is properly uncoupled or decoupled among the functional domain, the physical domain and the process domain. The design of the first generation microactuator array was highly coupled between the functional domain and the physical domain, and could not be implemented successfully over 24 months of fabrication effort. Once the design has been uncoupled, successful arrays could be fabricated within 6 months and could be upgraded easily. The brightest projection display system has been developed with the microactuator arrays.