Bend coupler for MEMS devices (MEMS microelectromechanical system)

摘要

There are presented micromachined inertial devices having a plurality of linearly moving masses which are coupled together by couplers that move linearly when the coupled masses exhibit a linear antiphase motion. Some of the described couplers are bendable and provide two degrees of freedom of movement of the coupled masses. Some such couplers are positioned between the coupled masses. The use of multiple couplers arranged to move in linearly opposite directions during the linear antiphase motion of the coupled masses provides for pulse balanced operation.