Analysis of Microelectromechanical Systems (MEMS) Devices by the Meshless Point Weighted Least-squares Method

摘要

In this paper, the characteristics of microelectromechanical systems (MEMS) devices are analyzed by a meshless method—point weighted least-squares (PWLS) method. In the present meshless method, field nodes and collocation points are adopted. The field nodes are used to construct the trial functions based on locally supported interpolation domains. The collocation points that can be independent of the field nodes are adopted to evaluate the total residuals of the problem domain and its boundaries. The least-squares technique is used to obtain the solution of the problem by minimizing the functional of the summation of weighted residuals. The present meshless method possesses some advantages compared with the conventional collocation methods, e.g., it is very stable for both regularly or irregularly nodal distributions; the displacement and derivative boundary conditions can be easily enforced; and the final coefficient matrix is symmetric. Several one-dimensional and two- dimensional MEMS devices that are governed by the nonlinear equations are studied by the present PWLS method. The simulated results are compared with those obtained by other simulation approaches and experimental results. It is shown that the PWLS method is very efficient and accurate for the analysis of MEMS devices.