MEMS穿孔板微执行器Pull-in特性分析

摘要

研究MEMS穿孔板微执行器Pull-in特性,分别推导忽略边缘效应模型和考虑边缘效应模型的穿孔板静电微执行器的Pull-in机理,并结合ANSYS软件有限元法计算同一器件的Pull-in参数,分析3种模型结果。得到：不考虑边缘效应影响时,Pull-in参数误差随孔大小的减小而增大,随着初始间距的增大而增大。考虑边缘效应模型在一定的范围内具有良好的精度。%The pull-in property of MEMS perforated-plate electrostatic micro actuator has been studied, and the models of the fringe capacitance and the ignoring fringe capacitance have been deduced respectively,and combining with ANSYS the computation of the parameter pull-in of the same device and analysis of three models have been made. It can be concluded that when no considering the fringe effect,the error of parameter pull-in will increase with the decrease of the hole size and increase with the increase of the initial spacing. When considering the fringe effect the model will have a good precise within limit.