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Hot Filament Makes Ultrahard Film

机译:热丝制造超硬薄膜

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摘要

Development of novel ultrahard materials is of great interest to the material science community. In particular, carbon nitride films have attracted a lot of interest due to its extreme properties. The hardness of pure b-C_3N_4 has been predicted to be at least equal, and perhaps greater, than that of diamond. University of Tulsa researchers Saibal Mitra, Justin Hartman (Department of Physics and Engineering Physics, University of Tulsa, Tulsa, OK 74104), and Tobias Hanrath (Department of Chemical Engineering, University of Tulsa, Tulsa, OK 74104) grew ultrahard phase of carbon nitride using hot-filament chemical vapor deposition (HFCVD). They deposited carbon nitride films on (100) oriented crystalline Si substrate by activating a mixture of CH_4/NH_3 over a hot tungsten filament.
机译:新型超硬材料的开发引起了材料科学界的极大兴趣。特别地,氮化碳膜由于其极好的性能而引起了很多兴趣。预测纯b-C_3N_4的硬度至少等于或大于金刚石的硬度。塔尔萨大学研究人员Saibal Mitra,贾斯汀·哈特曼(Justin Hartman)(塔尔萨大学物理与工程物理系,俄克拉荷马州74104)和托比亚斯·汉拉斯(托比亚斯·汉拉特)(塔尔萨大学化学工程系,俄克拉荷马州74104)生长了碳的超硬相使用热丝化学气相沉积(HFCVD)生成氮化物。他们通过在热的钨丝上活化CH_4 / NH_3的混合物,在(100)取向的晶体Si衬底上沉积了氮化碳膜。

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