Radiated fields of capacitive micromachined ultrasonic transducers in air

摘要

This paper presents a study of the radiated ultrasonic fields of capacitive micromachined ultrasonic transducers (often referred to as cMUTs) in air. These fields were modeled theoretically and then compared to the experimental near-field amplitude variations and directivity patterns of square cMUTs. The good agreement between theory and experiment indicates that the devices can be approximated to plane piston radiators. The fields of multiple elements driven in phase on the same silicon substrate are presented, where again comparison is made to theory. The results indicate that individual elements are unaffected by radiation through the silicon substrate from adjacent devices. It will also be demonstrated that it is possible to use the knowledge of these fields to develop air-coupled ultrasonic surface imaging systems.