A novel approach to gaseous field ion sources ion sources for focused ion beam applications

摘要

Experiments have demonstrated that significantlyincreased angular current densities may be obtained fromprotrusions formed from ultrafine precipitates compared to thenormal field ion specimens. The confinement of the ion-emittingregion to the precipitates is an effective of increasing the angularcurrent density. This type of emitter may be a potential candidatefor gaseous ion sources .