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Economic MEMS based 3-axis water proof accelerometer for dynamic geo-engineering applications

机译:基于经济型MEMS的3轴防水加速度计,用于动态地球工程应用

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摘要

Accelerometers are one of the most used sensors for monitoring dynamically sensitive systems either in field or in laboratory scale experiments. One of the key requirements in dynamic geo-engineering application is that these sensors should be water proof or water insensitive. Traditional accelerometers used in practice are based on piezoelectric/piezoresistive technology and are generally water sensitive. They are also one-axis (can measure one dimensional acceleration), big in size and expensive (typical minimum price is 300 USD/axis). These accelerometers are adapted in dynamic geo-engineering applications dealing with saturated soils by sealing the junction of the cables and the accelerometer by appropriate sealants. In this paper, the development of an inexpensive (circa 10 USD/axis), light weight, three-axis (can measure three dimensional accelerations) Micro Electro Mechanical Systems (MEMS) based accelerometers and their application to geo-engineering problems is presented. The sensor is based on ADXL 335 chip and can be made water proof. Performance of 3-axis MEMS accelerometer is presented along with the methodology to make it water proof.
机译:加速度计是用于在现场或实验室规模的实验中监视动态敏感系统的最常用的传感器之一。动态地球工程应用程序的关键要求之一是这些传感器应防水或对水不敏感。实践中使用的传统加速度计基于压电/压敏电阻技术,通常对水敏感。它们也是单轴(可以测量一维加速度),体积大且价格昂贵(典型的最低价格为300美元/轴)。这些加速度计适用于处理饱和土壤的动态地球工程应用,方法是用适当的密封剂密封电缆和加速度计的连接处。在本文中,提出了一种便宜的(大约10美元/轴),轻量的三轴(可以测量三维加速度)基于微机电系统(MEMS)的加速度计的开发及其在地球工程问题中的应用。该传感器基于ADXL 335芯片,可以防水。介绍了3轴MEMS加速度计的性能以及使其防水的方法。

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