The present invention relates to a microelectromechanical system (MEMS)-based three-axis acceleration sensor, including: an x-axis sensor mass for sensing an external acceleration that is input in a first axial direction parallel to a bottom wafer substrate; a y-axis sensor mass for sensing an external acceleration that is input in a second axial direction parallel to the bottom wafer substrate and perpendicular to the first axis; and a z-axis sensor mass formed to surround each of the x-axis sensor mass and the y-axis sensor mass and sensing an external acceleration that is input in a third axial direction perpendicular to the bottom wafer substrate. Accordingly, the present invention is able to sense an independent motion of each axis sensor mass while saving a space, thereby measuring each three-axis acceleration.
展开▼