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3 MEMS based 3-axis accelerometer

机译:基于3 MEMS的3轴加速度计

摘要

The present invention relates to a microelectromechanical system (MEMS)-based three-axis acceleration sensor, including: an x-axis sensor mass for sensing an external acceleration that is input in a first axial direction parallel to a bottom wafer substrate; a y-axis sensor mass for sensing an external acceleration that is input in a second axial direction parallel to the bottom wafer substrate and perpendicular to the first axis; and a z-axis sensor mass formed to surround each of the x-axis sensor mass and the y-axis sensor mass and sensing an external acceleration that is input in a third axial direction perpendicular to the bottom wafer substrate. Accordingly, the present invention is able to sense an independent motion of each axis sensor mass while saving a space, thereby measuring each three-axis acceleration.
机译:基于MEMS的三轴加速度传感器技术领域本发明涉及一种基于微机电系统(MEMS)的三轴加速度传感器,包括:用于感测在平行于底部晶片衬底的第一轴向上输入的外部加速度的x轴传感器块;以及用于检测外部加速度的x轴传感器块。 y轴传感器质量,其用于感测在平行于底部晶片衬底并且垂直于第一轴的第二轴向上输入的外部加速度;形成为围绕x轴传感器质量和y轴传感器质量中的每一个并感测在垂直于底部晶片衬底的第三轴向上输入的外部加速度的z轴传感器质量。因此,本发明能够在节省空间的同时感测每个轴传感器质量的独立运动,从而测量每个三轴加速度。

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