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3 MEMS based 3-axis accelerometer

机译:基于3 MEMS的3轴加速度计

摘要

The present invention relates to a three-axis acceleration sensor based on a MEMS sensor, and more particularly, to a three-axis acceleration sensor based on a MEMS sensor. A y-axis sensor mass for sensing an external acceleration input in a second axis direction parallel to the bottom wafer substrate and perpendicular to the first axis; And a z-axis sensor mass formed to surround the x-axis sensor mass and the y-axis sensor mass, respectively, for sensing an external acceleration inputted in a third axis direction perpendicular to the bottom wafer substrate, While sensing the independent motion of each axis sensor mass and measuring the three axis direction acceleration.
机译:基于MEMS传感器的三轴加速度传感器技术领域本发明涉及基于MEMS传感器的三轴加速度传感器,尤其涉及基于MEMS传感器的三轴加速度传感器。 y轴传感器质量,用于感测在平行于底部晶片衬底并垂直于第一轴的第二轴方向上输入的外部加速度;并且形成为分别围绕x轴传感器质量和y轴传感器质量的z轴传感器质量,以感测在垂直于底部晶片衬底的第三轴方向上输入的外部加速度,同时感测晶片的独立运动。每个轴的传感器质量并测量三个轴方向的加速度。

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