Multichannel Microchemical Reactor Comprising Replica-Molded Microplasma Devices: Chemiluminescence and Sulfur Deposition in $hbox{Ar/CS}_{2}$ Flows

Anderson T. S.; Ma J. H.; Park S.-J.; Eden J. G.

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Multichannel Microchemical Reactor Comprising Replica-Molded Microplasma Devices: Chemiluminescence and Sulfur Deposition in $hbox{Ar/CS}_{2}$ Flows

机译：包含仿制微等离子体设备的多通道微化学反应器：$ hbox {Ar / CS} _ {2} $流程中的化学发光和硫沉积

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摘要

Microchemical reactors consisting of parallel linear arrays of interconnected cylindrical microcavity plasma devices have been fabricated by replica molding in ultraviolet-curable polymer. Tests of 10 $times$

机译：由相互连接的圆柱形微腔等离子体装置的平行线性阵列组成的微化学反应器是通过在紫外线可固化聚合物中复制模制而成的。测试10个$ times $

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《IEEE Transactions on Plasma Science》 |2008年第4期|p.1250-1251|共2页
作者
Anderson T. S.; Ma J. H.; Park S.-J.; Eden J. G.;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类等离子体物理学;
关键词
Chemiluminescence; microchannels; microchemical reactor; microplasmas;

机译：化学发光;微通道;微化学反应器;微等离子体;

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机译：利用$ hbox {HfO} _ {2} $栅极电介质通过多沉积室温多退火工艺制造的MOSFET的器件性能和可靠性提高
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Multichannel Microchemical Reactor Comprising Replica-Molded Microplasma Devices: Chemiluminescence and Sulfur Deposition in $hbox{Ar/CS}_{2}$ Flows

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