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首页> 外文期刊>Plasma processes and polymers >Plasma Enhanced Chemical Vapor Deposition on Particulate Solid-State Materials for Improved Powder Processing
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Plasma Enhanced Chemical Vapor Deposition on Particulate Solid-State Materials for Improved Powder Processing

机译:等离子体增强化学气相沉积在颗粒状固态材料上以改善粉末加工

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摘要

>Abstract class="para">>The surface of fine lactose powder particulates was modified by direct-plasma exposure in a radio frequency (RF) discharge, in a mixture of oxygen and hexamethyldisiloxane (HMDSO) diluted in argon. Besides, the RF power (100–500 W) and the HMDSO flow rate (0–68 sccm) at constant oxygen-to-HMDSO flow rate ratio of 10 was varied in this study. Apart from the relatively high pressure of 2 mbar, the plasma process adopted is very much alike the plasma enhanced chemical vapor deposition of silica-like material descending from the plasma-chemical reaction of oxygen and HMDSO. With respect to the processability of powders in production lines to be solely gravity-driven, as for instance in the event of dye-filling, compression ratios (based on the powder bulk and mass density) were measured for solely gravity-driven filling of a graduated glass. A jolting volumeter was used to provide the compressibility of the compacted powder bulk. Higher compressibility of about 20% (improvement rate) was found for both experimental series: variation of HMDSO flow rate and variation of the discharge power. In both cases, an enhancement of the flowability of the powder was found to cause the compressibility improvement.
机译:>摘要 class =“ para”> >在氧气和六甲基二硅氧烷的混合物中,通过在射频(RF)放电中进行直接等离子暴露,对乳糖细粉颗粒的表面进行了改性( HMDSO)稀释在氩气中。此外,在这项研究中,恒定的氧气与HMDSO流量比为10时,RF功率(100–500 W)和HMDSO流量(0–68 sccm)有所变化。除了2 mbar的相对较高的压力外,采用的等离子体工艺与氧和HMDSO的等离子体化学反应产生的二氧化硅状材料的等离子体增强化学气相沉积非常相似。关于仅由重力驱动的生产线中粉末的可加工性,例如在染料填充的情况下,针对仅由重力驱动的填充物测量压缩比(基于粉末体积和质量密度)。刻度玻璃。使用震荡定量器来提供压实粉末块的可压缩性。在两个实验系列中均发现了较高的可压缩性,约为20%(改善率):HMDSO流量的变化和放电功率的变化。在这两种情况下,发现粉末流动性的增强都会引起可压缩性的改善。

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