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Increasing the bonding strength of chips on flex substrates using thermosonic flip-chip bonding process with nonconductive paste

机译:使用非导电性糊剂的热超声倒装芯片键合工艺提高柔性基板上芯片的键合强度

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摘要

Thermosonic flip-chip bonding process with a nonconductive paste (NCP) was employed to improve the processability and bonding strength of the flip-chip onto flex substrates (FCOF). A non-conductive paste was deposited on the surface of the copper electrodes over the flex substrate, and a chip with eight gold bumps bonded onto the copper electrodes by the thermosonic flip-chip bonding process.rnFor the chips and flex substrates assembly, ultrasonic power is important in the removal of some of the non-conductive paste on the surface of copper electrodes during thermosonic bonding. Accordingly, gold stud bumps in this study were directly bonded onto copper electrodes to form successful electrical paths between chips and the flex substrate. A particular ultrasonic power resulted in some metallurgical bonding between the gold bumps and the copper electrodes, increasing the bonding strength. The ultrasonic power was not only to remove the NCP from the copper electrodes, but also formed metallurgical bonds during the thermosonic flip-chip bonding process with NCP.rnIn this study, the parameters of the bonding of chips onto flex substrates using thermosonic flip-chip bonding process with NCP were a bonding force of 4.9 N, a curing time of 40 s, a curing temperature of 140 ℃ and an ultrasonic power of 14.46 W. The processability and bonding strength of flip-chips on flex substrates using thermosonic bonding process with NCP was verified in this study. This process has great potential to be applied to the packaging of consumed electronic products.
机译:采用非导电胶(NCP)的热超声倒装芯片键合工艺可提高倒装芯片在柔性基板(FCOF)上的可加工性和键合强度。在柔性基板上方的铜电极表面上沉积非导电胶,并通过热超声倒装芯片键合工艺将具有八个金凸点的芯片键合到铜电极上。对于芯片和柔性基板的组装,采用超声波功率在热超声键合过程中,去除铜电极表面的一些非导电胶非常重要。因此,本研究中的金柱形凸块直接键合到铜电极上,以在芯片和柔性基板之间形成成功的电气路径。特定的超声功率导致金凸块和铜电极之间的冶金结合,从而提高了结合强度。超声功率不仅用于去除铜电极上的NCP,而且在与NCP进行热超声倒装芯片键合过程中还形成了冶金结合。rn在这项研究中,使用热超声倒装芯片将芯片键合到柔性基板上的参数NCP的粘结工艺为4.9 N的粘结力,40 s的固化时间,140℃的固化温度和14.46 W的超声功率。 NCP在这项研究中得到了验证。此过程具有很大的潜力可应用于已消费电子产品的包装。

著录项

  • 来源
    《Microelectronic Engineering》 |2010年第4期|624-630|共7页
  • 作者单位

    Department of Occupational Safety and Health, Chung Shan Medical University, No. 110, Sec. 1, Chien-Kuo N. Road, Taichung 402, Taiwan, ROC Department of Medical Research, Chung Shan Medical University Hospital, No. 110, Sec. 1, Chien-Kuo N. Road, Taichung 402, Taiwan, ROC;

    Department of Mechanical Engineering, National Chung Cheng University, 168 University Road, Minhsiung, Chiayi 621, Taiwan, ROC;

    Material and Chemical Research Laboratories, Industrial Technology Research Institute, 195, Sec. 4, Chung Hsing Road, Chutung, Hsinchu, Taiwan, ROC;

    Department of Packaging Equipment, Laser Application Center, Industrial Technology Research Institute South Branch, No. 8, Gongyan Road, Liujia, Tainan 734, Taiwan, ROC;

    Department of Packaging Equipment, Laser Application Center, Industrial Technology Research Institute South Branch, No. 8, Gongyan Road, Liujia, Tainan 734, Taiwan, ROC;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    flex substrates; non-conductive pastes; thermosonic flip-chip bonding process;

    机译:柔性基材非导电胶热超声倒装芯片键合工艺;

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