Well-crystallized barium titanate nanoparticles prepared by plasma chemical vapor deposition

摘要

Perovskite BaTiO_3 nanoparticles were synthesized by the RF-plasma chemical vapor deposition method using Ba(DPM)_2 and Ti(OiPr)_4 as source materials. The suitable Ba/Ti molar ratio of reactants for preparing a single phase of BaTiO_3 with a stoichiometric composition was experimentally confirmed to be about 1.2 +- 0.1. The average particle size of BaTiO_3 nanoparticles was measured to be 15.4 nm by transmission electron microscopy (TEM) images, which was nearly equivalent to the crystalline size (12.2 nm) calculated from X-ray diffraction (XRD) measurements using Hall's equation. Therefore, most of the BaTiO_3 nanoparticles were single crystals. Most BaTiO_3 nanoparticles were confirmed to be well-crystallized single crystals with a clear lattice image obtained by high-resolution TEM.