Nanocrystalline yttria films by plasma-assisted liquid injection (PA-LI) CVD technique using metallorganic precursors

摘要

Nanocrystalline cubic Y_2O_3 film deposition by PA-LICVD was studied at 773 K in a N_2/O_2 plasma environment with methanol and triglyme solution of aquatris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III) and its polyether adduct complexes as precursors. The X-ray powder patterns are analyzed and found to be triclinic and monodinic for Y(tmhd)_3-H_2O(1) and Y_2(tmhd)_6·triglyme (2). Y_2O_3 film with (111) plane as the dominant orientation was obtained on graphite under a deposition pressure of 0.8-1.2 mbar.