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Effect of Warpage of Flip Chip Packages Due to the Underfill Encapsulating Process on Interconnect Reliability

机译:底部填充封装工艺导致倒装芯片封装翘曲对互连可靠性的影响

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In flip chip packages, it is common practice for interconnects to be encapsulated with a liquid underfill material. This paper describes the effects of different underfill processes, i.e., the conventional capillary-flow underfill and two no-flow underfill processes, on flip chip packaging. The warpage of the package was examined, and the value of this during three different underfill encapsulating processes was measured. In addition, the interconnect reliability of the bump bonds after thermal-cycling was evaluated using a test circuit. The warpage of the package before curing varied depending on the assembly process, but that after curing was almost the same for all the processes studied. It was found that the interconnect reliability is closely related to the differences in the warpage arising from the assembly process, and that the smaller change in warpage introduced by the curing process gave a higher interconnect reliability for the bump bonds. Based on these findings, lower curing temperatures are considered to be more effective for improving the mountability of the package and the interconnect reliability.
机译:在倒装芯片封装中,通常的做法是用液体底部填充材料封装互连。本文介绍了不同的底部填充工艺,即常规的毛细流动底部填充和两种无流动底部填充工艺,对倒装芯片封装的影响。检查了包装的翘曲,并测量了在三种不同的底部填充封装过程中的翘曲值。另外,使用测试电路评估了热循环后的凸点结合的互连可靠性。固化前包装的翘曲随组装过程而变化,但固化后的翘曲对于所有研究的过程几乎相同。已经发现,互连可靠性与由组装工艺引起的翘曲的差异密切相关,并且由固化工艺引入的翘曲的较小变化使得凸点键合具有更高的互连可靠性。基于这些发现,较低的固化温度被认为对于改善封装的可安装性和互连可靠性更为有效。

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