Diagonal Mode van der Pauw Stress Sensors: Proof of Diagonal-Mode Conjecture

摘要

The conjecture discussed in our previous paper [Jaeger, R. C., Motalab, M., Hussain, S., and Suhling, J. C., 2014, "Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors," ASME J. Electron. Packag., 136(4), p. 041014; Jaeger, R. C., Motalab, M., Hussain, S., and Suhling, J. C., 2018, Erratum: "Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors," ASME J. Electron. Packag., 140(1), p. 0170011 was backed up by measurements and simulation results, but not mathematically proven. A proof based upon two-port impedance parameter reciprocity is presented with additional experimental confirmation.