METAL CONDUCTIVITY MEASUREMENT ELECTRODE AND TEMPERATURE CONTROLLER USING VAN DER PAUW METHOD

摘要

A metal conductivity measurement electrode and a temperature controller using van der pauw are provided to precisely estimate various metal conductivities by implementing a temperature control device to control temperature within a measurement chamber. A temperature chamber(100) includes a temperature control unit, which generates cool and hot air in order to reach a predetermined temperature condition. Plural test jigs are freely moved between a test piece and the corner of a support plate(30) within the temperature chamber, and fixed on the support plate according to the size of the test piece. Plural test piece measuring units are formed on the test jigs, and contacted to the test piece in order to measure voltage from the corner of the test piece. A test piece height control unit controls the height of the test piece according to the thickness of the test piece.