Two-dimensional modeling of subthreshold current and subthreshold swing of double-material-gate (DMG) strained-Si (s-Si) on SGOI MOSFETs

摘要

The present paper proposes the surface potential based two-dimensional (2D) analytical models of subthreshold current and subthreshold swing of nanoscale double-material-gate (DMG) strained-Si (s-Si) on Silicon-Germanium-on-Insulator (SGOI) MOSFETs. The surface potential expression has been directly taken from our previous reported work. The effect of various device parameters on subthreshold current and swing like Ge mole fraction, Si film thickness, gate-length ratio and various combinations of control/screen gate work-functions have been discussed. The validity of the present 2D model is verified by using ATLAS~™, a 2D device simulator from Silvaco.