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On the electrostatic control achieved in transistors based on multilayered MoS_2: A first-principles study

机译:基于多层MoS_2的晶体管中的静电控制:第一性原理研究

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摘要

In this work, the electrostatic control in metal-oxide-semiconductor field-effect transistors based on MoS_2 is studied, with respect to the number of MoS_2 layers in the channel and to the equivalent oxide thickness of the gate dielectric, using first-principles calculations combined with a quantum transport formalism. Our simulations show that a compromise exists between the drive current and the electrostatic control on the channel. When increasing the number of MoS_2 layers, a degradation of the device performances in terms of subthreshold swing and OFF currents arises due to the screening of the MoS_2 layers constituting the transistor channel.
机译:在这项工作中,基于第一原理计算,研究了基于MoS_2的金属氧化物半导体场效应晶体管的静电控制,涉及沟道中MoS_2的层数和栅极电介质的等效氧化物厚度。结合量子传输形式主义。我们的仿真表明,驱动电流和通道上的静电控制之间存在折衷。当增加MoS_2层数时,由于屏蔽了构成晶体管沟道的MoS_2层,因此导致了亚阈值摆幅和OFF电流方面的器件性能下降。

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  • 来源
    《Journal of Applied Physics》 |2017年第4期|044505.1-044505.6|共6页
  • 作者单位

    Semiconductor Physics Laboratory, Department of Physics and Astronomy, University of Leuven, Celestijnenlaan 200 D, B-3001 Leuven, Belgium,IMEC, 75 Kapeldreef, B-3001 Leuven, Belgium;

    IMEC, 75 Kapeldreef, B-3001 Leuven, Belgium,Department of Chemistry, Plasmant Research Group, University of Antwerp, B-2610 Wilrijk-Antwerp, Belgium;

    Integrated Systems Laboratory, ETH Zuerich, 8092 Zuerich, Switzerland;

    IMEC, 75 Kapeldreef, B-3001 Leuven, Belgium;

    Semiconductor Physics Laboratory, Department of Physics and Astronomy, University of Leuven, Celestijnenlaan 200 D, B-3001 Leuven, Belgium;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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