Variable Resonance Frequency Selection for Fishbone-Shaped Microelectromechanical System Resonator Based on Multi-Physics Simulation

摘要

In this paper, we present and demonstrate the principle of variable resonance frequency selection by using a fishbone-shaped microelectromechanical system (MEMS) resonator. To analyze resonator displacement caused by an electrostatic force, a multi-physics simulation, which links the applied voltage load to the mechanical domain, is carried out. The simulation clearly shows that resonators are operated by three kinds of electrostatic force exerted on the beam. A new frequency selection algorithm that selects only one among various resonant modes is also presented. The conversion matrix that transforms the voltages applied to each driving electrode into the resonant beam displacement at each resonant mode is first derived by experimental measurements. Following this, the matrix is used to calculate a set of voltages for maximizing the rejection ratio in each resonant mode. This frequency selection method is applied in a fishbone-shaped MEMS resonator with five driving electrodes and the frequency selection among the 1st resonant mode to the 5th resonant mode is successfully demonstrated. From a fine adjustment of the voltage set, a 42 dB rejection ratio is obtained.