Microelectromechanical system device for universal mobile telecommunication system based mobile telephone, has thin piezoelectric film with radio frequency switch and resonator with thin piezoelectric resonator film

摘要

The device has a thin piezoelectric film (18) with a radio frequency switch (14) and a resonator with thin piezoelectric resonator film (10) mounted on a substrate (12) having an acoustic mirror (28). The resonator has a portion (16) of the thin film arranged between two metal electrodes (20, 24). The switch has a bi-layer beam including a metallic contact (50) connected to fixed metal contacts by control electrodes (40, 42).