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机译:天然线性多糖在绿色抗蚀剂聚合物中的电子束和极紫外平版印刷应用
Department of Mechanical Systems Engineering, Toyama Prefectural University, Imizu, Toyama 939-0398, Japan, Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan;
The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;
Quantum Beam Science Directorate, Japan Atomic Energy Agency, Takasaki, Gunma 370-1292, Japan;
Department of Mechanical Systems Engineering, Toyama Prefectural University, Imizu, Toyama 939-0398, Japan;
Department of Mechanical Systems Engineering, Toyama Prefectural University, Imizu, Toyama 939-0398, Japan;
The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;
The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;
The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;
Department of Mechanical Systems Engineering, Toyama Prefectural University, Imizu, Toyama 939-0398, Japan;
机译:极紫外和电子束平版印刷术中基于聚(4-羟基苯乙烯)的化学放大抗蚀剂的自由基阳离子动力学
机译:添加光酸产生剂的聚苯乙烯基聚合物的脉冲辐射分解研究:极紫外光和电子束化学放大抗蚀剂的反应机理
机译:面向电子束光刻应用的新型非化学放大(n-CARS)负性抗蚀剂
机译:使用可水显影抗蚀剂材料的极紫外和电子束光刻处理
机译:聚合物抗蚀剂的电子束感应电导率效应和电子束光刻中的电荷感应电子束偏转模拟。
机译:电子束辐照处理的新型基于麻和天然橡胶的绿色高分子复合材料
机译:电子束光刻薄膜抗蚀剂的开发与应用