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Gold Ribbon Bonding for Microelectronic Interconnection: A Designed Experiment to Evaluate Process Opportunities

机译:用于微电子互连的金带键合:旨在评估工艺机会的设计实验

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摘要

This paper presents results from a Design of Experiments (DOE) study undertaken to evaluate the feasibility of this study included the following: Establishing the viability of using a manual wire bonder to make gold ribbon bonds. Determining preliminary equipment process parameters for making robust and consistent ribbon bonds. Investigating the effect of different ribbon types on these process parameters and the resulting bonds. Establishing limits on the resultant interconnection geometries that can be achieved using this process. Determining whether aging affects ribbon bond pull strength.
机译:本文介绍了为评估这项研究的可行性而进行的实验设计(DOE)研究的结果,包括以下内容:确定使用手动焊线机进行金带焊的可行性。确定初步的设备工艺参数,以进行牢固且一致的碳带键合。研究不同类型的碳带对这些工艺参数和所得键的影响。建立使用此过程可以实现的最终互连几何形状的限制。确定老化是否会影响碳带粘结拉力。

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