EV Group launches first step and repeat mastering services for nanoimprint lithography

摘要

EV GROUP (EVG), a supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology, and semiconductor markets, today announced that it has established the EVG Step-and-Repeat (S&R) Mastering Shop, a new service offering to help customers accelerate the deployment of nanoimprint lithography (NIL) in high-volume manufacturing. The EVG S&R Mastering Shop™ uses EVG's own equipment and cleanroom facilities to provide contract manufacturing of large-area master templates and stamps, which are used to produce working stamps for wafer-level and panel-level NIL processing. By eliminating the capital costs associated with owning dedicated S&R systems for master stamp fabrication, customers can more easily integrate NIL technology in their new product designs. Devices and applications benefiting from EVG's S&R NIL solutions include augmented reality waveguides, advanced micro-optics for optical sensors, micro-lenses, nanophotonics and silicon photonics. The EVG S&R Mastering Shop is a key addition to EVG's NILPhotonics® Competence Center framework, located at EVG's corporate headquarters in Austria.