首页>
外国专利>
Fabrication of seamless large area master templates for imprint lithography using step and repeat tools
Fabrication of seamless large area master templates for imprint lithography using step and repeat tools
展开▼
机译:使用分步和重复工具制造用于压印光刻的无缝大面积主模板
展开▼
页面导航
摘要
著录项
相似文献
摘要
Described are methods of forming large area templates useful for patterning large area optical devices including e.g. wire grid polarizers (WGPs). Such methods provide for seamless patterning of such large area devices.
展开▼