首页> 外文期刊>Engineering with Computers >Three-dimensional analysis of Marangoni flow and radial segregation in Ge_xSi_(1-x) melt with Czochralski configuration
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Three-dimensional analysis of Marangoni flow and radial segregation in Ge_xSi_(1-x) melt with Czochralski configuration

机译:直拉型Ge_xSi_(1-x)熔体中Marangoni流动和径向偏析的三维分析

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摘要

In order to examine the flow field and the radial segregation of silicon (Si) in a Ge_xSi_(1-x) melt with an idealized Czochralski (Cz) configuration, we conducted a series of unsteady three-dimensional (3-D) numerical simulations under zero-gravity conditions. The effect of convection driven by surface tension on the free surface of the melt was included in the model, by considering thermal, as well as solutal Marangoni convection. The concentration and flow fields at several stages during crystal growth are presented for several temperature differences, driving the Marangoni convection. The simulation results indicate that the flow and concentration fields are axisymmetric for Ma_T < 625 and become oscillatory and 3-D for higher values. It was found that the maximum Si concentration difference at the growth interface decreases as thermal Marangoni number increases due to higher flow velocities in the vicinity of the interface. However, temporal fluctuations of Si concentration at the interface increase at higher thermal Marangoni numbers. The effects of aspect ratio (A_r) were also considered in the model. It was found that the aspect ratio of the melt in the crucible has a prominent influence on the flow pattern in the melt which, in turn, effects the Si concentration at the growth interface.
机译:为了检查具有理想Czochralski(Cz)配置的Ge_xSi_(1-x)熔体中硅(Si)的流场和径向偏析,我们进行了一系列非稳态三维(3-D)数值模拟在零重力条件下。考虑到热和溶质的马兰戈尼对流,模型中包括了由表面张力驱动的对流对熔体自由表面的影响。给出了晶体生长过程中几个阶段的浓度和流场,它们存在多个温差,从而驱动了Marangoni对流。仿真结果表明,对于Ma_T <625,流场和浓度场是轴对称的,对于更高的值,流场和浓度场变成振荡的,而3-D场。已经发现,由于界面附近较高的流速,随着热Marangoni数增加,在生长界面处的最大Si浓度差减小。然而,在较高的热马兰戈尼数下,界面处Si浓度的时间波动会增加。在模型中还考虑了宽高比(A_r)的影响。已经发现,坩埚中熔体的长径比对熔体中的流型具有显着影响,进而影响生长界面处的Si浓度。

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