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首页> 外文期刊>IEEE Transactions on Components, Hybrids, and Manufacturing Technology >Precision flip-chip solder bump interconnects for optical packaging
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Precision flip-chip solder bump interconnects for optical packaging

机译:用于光学封装的精密倒装芯片焊料凸点互连

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Solder bump flip-chip technology is particularly well suited to the packaging of classes of devices, such as fine pitch light emitting diode (LED) array electrophotographic print heads, which place premiums on precision alignment, high electrical interconnect density, close die placement, and low cost. The manufacturing feasibility of such an array was investigated, with particular emphasis on the quality of surface tension induced self-alignment inherent in solder bump bonding. An array of surface emitting LED diode array chips was fabricated employing 75- mu m-diameter solder bumps on 156- mu m pitch. The chips were spaced 15 mu m edge-to-edge, face down, on a glass substrate patterned with thin-film metallization. Chip-to-substrate alignment errors in the X-Y plane were found to be under 1.5 mu m with a standard deviation of under 1.0 mu m, well below the 10-15- mu m error typical of the standard mechanical alignment method. Improvements in light output uniformity and a reduction in scattered light over arrays manufactured with conventional die placement and wire bonding were also observed.
机译:焊料凸点倒装芯片技术特别适合用于封装各种类型的器件,例如细间距发光二极管(LED)阵列电子照相打印头,这些器件在精确对准,高电互连密度,紧密管芯放置以及低成本。研究了这种阵列的制造可行性,特别强调了焊料凸点键合所固有的表面张力引起的自对准的质量。使用直径为75微米,间距为156微米的焊料凸点制造了一系列表面发光LED二极管阵列芯片。芯片在以薄膜金属化图案形成的玻璃基板上,面朝下以边对边15微米的间隔排列。发现芯片在X-Y平面上的对准误差在1.5μm以下,标准偏差在1.0μm以下,远低于标准机械对准方法的10-15μm误差。还观察到与通过常规管芯放置和引线键合制造的阵列相比,光输出均匀性得到改善并且散射光减少。

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