首页> 外文会议>Electronic Components and Technology Conference, 1992. Proceedings., 42nd >Precision flip-chip solder bump interconnects for optical packaging
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Precision flip-chip solder bump interconnects for optical packaging

机译:用于光学封装的精密倒装芯片焊料凸点互连

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Solder bump flip chip technology is particularly well suited to the packaging of classes of devices, such as fine pitch LED (light emitting diode) array electrophotographic print heads, which place premiums on precision alignment, high electric interconnect density, close die placement, and low cost. The manufacturing feasibility of such an array was investigated, with particular emphasis on the quality of surface tension induced self-alignment associated with solder bump bonding. An array of LED diode array chips was fabricated employing 75 mu -dia. solder bumps on 156 mu m pitch. The chips were spaced 15 mu edge-to-edge, face down, on a glass substrate patterned with thin film metallization. Chip-to-substrate alignment errors in the X-Y plane were found to be under 1.5 mu m with a standard deviation of under 1.0 mu m, well below the 10-15 mu m error typical of the standard mechanical alignment method. Improvements in light output uniformity and a reduction in scattered light over arrays manufactured with conventional die placement and wire bonding were also observed.
机译:焊料凸块倒装芯片技术特别适用于装置的封装,如精细间距LED(发光二极管)阵列电子照相打印头,将溢出在精密对准,高电互连密度,闭合模具置于置位和低电平成本。研究了这种阵列的制造可行性,特别强调表面张力诱导与焊料凸块接合相关的自对准的质量。采用75亩-DIA制造了一系列LED二极管阵列芯片。焊料凸起156亩。在用薄膜金属化图案化的玻璃基板上,芯片朝下间隔开15μm边缘到边缘。发现X-Y平面中的芯片到基板对准误差在1.5μm下,标准偏差为1.0μm,远低于标准机械对准方法的10-15μm误差。还观察到光输出均匀性的改进和用传统模具放置和引线键合的阵列上的散射光的减小。

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