A review of capacitive MEMS hydrogen sensor using Pd-based metallic glass with fast response and low power consumption

摘要

This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted T-shaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature.