METHOD FOR OPERATING A CAPACITIVE MEMS SENSOR AND CAPACITIVE MEMS SENSOR

摘要

The invention relates to a method for operating a capacitive MEMS sensor, comprising the steps of - providing a defined electrical potential on a deflectably arranged seismic mass of the MEMS sensor, - capacitively inducing a vibrational motion of the seismic mass by means of a clocked electrical control voltage, - compensating for fluctuations of the provided electrical potential, caused by the clocked electrical control voltage, on the seismic mass by specific charging and/or discharging of an electrical storage element connected to the seismic mass, according to the clock of the clocked electrical control voltage.