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A review of capacitive MEMS hydrogen sensor using Pd‐based metallic glass with fast response and low power consumption

机译：基于Pd基金属玻璃的电容MEMS氢传感器综述，具有快速响应和低功耗

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Hiroaki Yamazaki; Yumi Hayashi; Kei Masunishi; Daiki Ono; Tamio Ikehashi;
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1. A review of capacitive MEMS hydrogen sensor using Pd-based metallic glass with fast response and low power consumption [J] . Yamazaki Hiroaki, Hayashi Yumi, Masunishi Kei, Electronics and communications in Japan . 2019,第3期

机译：使用基于Pd的金属玻璃的电容式MEMS氢传感器的快速响应和低功耗的综述
2. Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors [J] . Hayashi Yumi, Yamazaki Hiroaki, Ono Daiki, International journal of hydrogen energy . 2018,第19期

机译：用于无磁滞和快速响应电容式MEMS氢传感器的PdCuSi金属玻璃膜的研究
3. High sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium alloy for fast response and low power consumption [J] . Yamazaki Hiroaki, Hayashi Yumi, Masunishi Kei, Journal of Micromechanics and Microengineering . 2018,第9期

机译：具有倒置T形电极和环形钯合金的高灵敏度MEMS电容氢传感器，用于快速响应和低功耗
4. Investigation of PD-CU-SI metallic glass film for hysterisis-free and fast response capacitive mems hydrogen sensors [C] . Yumi Hayashi, Hiroaki Yamazaki, Daiki Ono, International Conference on Solid-State Sensors, Actuators and Microsystems . 2017

机译：PD-CU-SI金属玻璃膜的无磁滞和快速响应电容式膜氢传感器的研究
5. Capacitive-Gap MEMS Resonator-based Oscillator Systems for Low-Power Signal Processing [D] . Naing, Thura Lin. 2015

机译：电容间隙MEMS基于谐振器的低功耗信号处理振荡器。
6. Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor [O] . Rugved Likhite, Aishwaryadev Banerjee, Apratim Majumder, 2019

机译：参数放大的低功耗MEMS电容式湿度传感器
7. A Tunable Palladium-based Capacitive MEMS Hydrogen Sensor Performing High Dynamics, High Selectivity and Ultra-low Power Sensing [O] . Walewyns Thomas, Spirito David, Francis Laurent A. 2014

机译：基于钯的可调谐电容式MEMS氢传感器，具有高动态，高选择性和超低功耗感测

A review of capacitive MEMS hydrogen sensor using Pd‐based metallic glass with fast response and low power consumption

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