The Story of MEMS and Microsystems Packaging

摘要

Microelectromechanical systems (MEMS) consist of mechanical devices and machine components ranging in size from a few microns to a few hundred microns. They can be the mechanical interconnects of microsystems. They also can transduce signals from one physical domain to another, such as mechanical-to-electrical, electrical-to-mechanical, electrical-to-chemical, etc. These devices are broadly categorized as either sensors or actuators. MEMS sensors are devices such as pressure sensors, accelerometers, and gyrometers that perceive an aspect of their environment and produce a corresponding output signal.