Modeling and Significance of Fringe Capacitance in Nonclassical CMOS Devices With Gate-Source/Drain Underlap

摘要

Parasitic gate-source/drain (G-S/D) fringe capacitance in nonclassical nanoscale CMOS devices, e.g., double-gate (DG) MOSFETs, is shown, using two-dimensional numerical simulations, to be very significant, gate bias-dependent, and substantially reduced by a well-designed G-S/D underlap. Analytical modeling of the outer and inner components of the fringe capacitance is developed and verified by the numerical simulations; a BOX-fringe component is modeled for single-gate fully depleted silicon-on-insulator MOSFETs. With the new modeling implemented in UFDG, our process/physics-based generic compact model for DG MOSFETs, UFDG/Spice3 shows how nanoscale DG CMOS speed is severely affected by the fringe capacitance and how this effect can be moderated by an optimal underlap, which yields a good tradeoff between the parasitic capacitance and the S/D resistance.