PMOS input merged bipolar/sidewall MOS transistors (PBiMOS transistors)

摘要

A concept of merging vertical n-p-n bipolar and sidewall PMOS transistors into merged PBiMOS transistors is described. This concept allows device structures which perform more complex functions to be integrated into a given area. The feasibility of this concept is demonstrated by fabricating and DC characterizing PBiMOS transistor structures which occupy approximately 1.1 times the area of a single n-p-n bipolar transistor. The PMOS sidewall transistor characterization results suggest that a reasonable control of the key device parameters may be achieved. These results also suggest that, for the 23-nm gate oxide thickness, the doping requirements for the n/sup -/ collector of the n-p-n bipolar and the channel of the sidewall PMOS transistors are similar.