Molecular Electronic Transducer-Based Low-Frequency Accelerometer Fabricated With Post-CMOS Compatible Process Using Droplet as Sensing Body

摘要

This letter reports a low-frequency micro-accelerometer implementing a liquid-state sensing body, based on molecular electronic transducer (MET) in post-CMOS compatible microfabrication technology. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body, and a MET electrode configuration as the sensing read-out mechanism. The promising and unique performance of the MET design allows the fabricated device to achieve 10.8 ${rm V}/{rm G}({rm G}=9.81~{rm m}/{rm s}^{2})$ sensitivity at 20 Hz with nearly flat response over the frequency range from 1 to 50 Hz, and a low noise floor of 75 $mu{rm G}/sqrt{rm Hz}$ at 20 Hz.