Noncyclic Scheduling for Timed Discrete-Event Systems With Application to Single-Armed Cluster Tools Using Pareto-Optimal Optimization

摘要

Recently, semiconductor manufacturing fabs tend to reduce the wafer lot size, down to just a few. Consequently, the wafer recipe or wafer flow pattern changes frequently. For such problems, it is impossible to apply conventional prevalent cyclic scheduling methods that repeat processing of wafers in an identical cyclic tool operation sequence. We therefore consider the noncyclic scheduling problem of single-armed cluster tools that process wafers with different recipes.