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Silicon isotopic zoning in silicon crystals caused by the isotopic fractionation at the crystal-melt interface

机译:晶体熔体界面的同位素分馏引起的硅晶体中的硅同位素分区

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We carried out experiments on crystal growth from silicon melt with the FZ technique. We have precisely determined ~(30)Si/~(28)Si ratios of the obtained crystal using the IMS-1270 SIMS with Faraday cup multicollectors. Isotopic variations in the range of 1 per thousand were observed along the growth direction of the crystal. We have observed the position of the interface between the grown crystal and melt during the crystal growth experiment using a CCD camera observation system. As we made a fast downward traveling of the crystal-melt system, the interface position and temperature fell quickly while the silicon isotopic ratio increased. It is inferred that the degree of supercooling of the silicon melt played a crucial role for controlling the isotopic ratio of the growing crystal.
机译:我们使用FZ技术对从硅熔体中晶体生长进行了实验。我们使用带有法拉第杯多收集器的IMS-1270 SIMS精确确定了所得晶体的〜(30)Si /〜(28)Si比。沿晶体的生长方向观察到的同位素变化范围为千分之一。我们已经使用CCD相机观察系统观察了晶体生长实验期间生长的晶体和熔体之间的界面位置。当我们快速向下移动晶体熔体系统时,界面位置和温度迅速下降,而硅同位素比增加。可以推断,硅熔体的过冷度对于控制生长晶体的同位素比起关键作用。

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